Reaction bonded silicon carbide wafer boat introduction ：

In recent years, the semiconductor and photovoltaic industries have developed rapidly, the scale of the industry has increased rapidly, manufacturing equipment has continued to evolve toward precision and complexity, and there have been increasing technical requirements and localization demands for key components of high-precision ceramics. It is a new development opportunity and turning point for silicon carbide manufacturing enterprises.

Silicon carbide wafer boats have emerged as a superior solution for high-temperature industrial processes, particularly in semiconductor manufacturing, metallurgy, and advanced ceramics sintering. These components combine the exceptional properties of silicon carbide with innovative design, offering distinct advantages over traditional ceramic or graphite alternatives.

‌1. Exceptional Thermal and Mechanical Stability‌

SIC wafer boatS exhibit outstanding thermal shock resistance, maintaining structural integrity even when subjected to rapid temperature fluctuations up to 1,380°C. This stability stems from silicon carbide's low thermal expansion coefficient (4.0×10⁻⁶/°C) combined with the reaction-bonding process that minimizes internal stresses. Unlike conventional graphite boats that degrade above 500°C in oxidative environments, SIC wafer boat components demonstrate excellent oxidation resistance, ensuring longevity in repeated high-temperature cycles.

‌2. Optimized Design for Process Efficiency‌

The three-post configuration enhances thermal uniformity in critical applications such as diffusion processes and CVD (Chemical Vapor Deposition). The symmetrical posts ensure even heat distribution, reducing temperature gradients to less than 5°C across the boat's length. This design also minimizes wafer warping during semiconductor processing, improving yield rates by up to 15% compared to flat-bottom boats. The open structure facilitates better gas flow dynamics, enhancing process consistency in atmosphere-controlled furnaces.

‌3. Superior Chemical Inertness‌

Silicon Carbide Wafer Boat's non-reactive nature makes it ideal for handling corrosive materials. With less than 0.5% porosity achieved through the reaction-bonding process, these boats demonstrate remarkable resistance to acidic/alkaline fluxes and molten metals. In solar cell manufacturing, this property prevents metallic contamination (e.g., aluminum or silver), maintaining wafer purity with impurity levels below 1 ppb.

Our company can currently produce large diameter tubes, thin wall tubes, cantilever propellers, Reaction bonded silicon carbide wafer boats, etc.

Advantages of Reaction bonded silicon carbide wafer boat ：

1.Our SIC wafer boats are resistant to high temperatures, wear and creep;

2.Our SIC wafer boats have high impact resistance and long service life;

3.Our SIC wafer boats have high density and can be customized according to customer needs;

Quality Assurance and Quality Control ：

In order to meet customer demand for our company's products, every production process is strictly controlled from the moment raw materials enter the factory. All products are strictly inspected before leaving the factory. Based on our management system, our inspection and control of product quality comply with industry and corporate standards.