
Shenyang Starlight 8 inches silicon carbide wafer boat
2025-05-26 14:06
Shenyang Starlight Advanced Ceramics Successfully Delivers 8-inch Silicon Carbide Three-post Boats for Semiconductor Wafer Processing
Shenyang Starlight Advanced Ceramics Co., Ltd., a leading manufacturer of silicon carbide products with over 30 years of industry experience, has recently achieved a significant milestone by successfully developing and delivering specialized 8-inch silicon carbide three-post boats for semiconductor wafer heat treatment applications.
Breakthrough in Wafer Processing Technology
The newly developed 8-inch silicon carbide three-post boats represent a major advancement in wafer handling technology, specifically designed for:
High-temperature processing of 200mm semiconductor wafers
Uniform thermal distribution during critical fabrication steps
Reduced contamination risks in cleanroom environments
Technical Superiority
These precision-engineered boats feature:
Ultra-high purity silicon carbide material (99.99% purity)
Optimized three-post design for minimal wafer contact
Exceptional thermal shock resistance (withstand rapid temperature changes up to 1,400°C)
Superior chemical inertness against corrosive process gases
Meeting Industry Demands
"Our 8-inch silicon carbide three-post boats address the semiconductor industry's growing need for reliable, high-performance wafer carriers," said Dr. Li , Chief Technology Officer. "They offer significant advantages over traditional quartz carriers, including longer service life and better thermal stability."
Rigorous Development Process
The product development involved:
18 months of intensive R&D
Collaboration with leading semiconductor manufacturers
Over 200 thermal cycle tests
Strict particle contamination control measures
Quality Assurance
Each unit undergoes:
Dimensional accuracy verification (±0.02mm tolerance)
Surface roughness testing (Ra < 0.2μm)
Comprehensive visual inspection
Final cleaning and packaging in Class 100 cleanroom
Applications
The boats are currently being used for:
Diffusion processes
Annealing treatments
Oxidation processes
CVD applications
Future Developments
Building on this success, Shenyang Starlight is now developing:
12-inch version for next-generation wafer sizes
Customized designs for specific process requirements
Advanced coatings for specialized applications
Company Commitment
"As a company with three decades of ceramic expertise, we remain committed to pushing the boundaries of semiconductor materials technology," added Dr. Li. "This product launch demonstrates our capability to develop solutions that meet the industry's most demanding requirements."
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