Shenyang Starlight Advanced Ceramics Successfully Delivers 8-inch Silicon Carbide Three-post Boats for Semiconductor Wafer Processing

Shenyang Starlight Advanced Ceramics Co., Ltd., a leading manufacturer of silicon carbide products with over 30 years of industry experience, has recently achieved a significant milestone by successfully developing and delivering specialized 8-inch silicon carbide three-post boats for semiconductor wafer heat treatment applications.

Breakthrough in Wafer Processing Technology

The newly developed 8-inch silicon carbide three-post boats represent a major advancement in wafer handling technology, specifically designed for:

• High-temperature processing of 200mm semiconductor wafers

• Uniform thermal distribution during critical fabrication steps

• Reduced contamination risks in cleanroom environments

Technical Superiority

These precision-engineered boats feature:

• Ultra-high purity silicon carbide material (99.99% purity)

• Optimized three-post design for minimal wafer contact

• Exceptional thermal shock resistance (withstand rapid temperature changes up to 1,400°C)

• Superior chemical inertness against corrosive process gases

Meeting Industry Demands

"Our 8-inch silicon carbide three-post boats address the semiconductor industry's growing need for reliable, high-performance wafer carriers," said Dr. Li , Chief Technology Officer. "They offer significant advantages over traditional quartz carriers, including longer service life and better thermal stability."

Rigorous Development Process

The product development involved:

• 18 months of intensive R&D

• Collaboration with leading semiconductor manufacturers

• Over 200 thermal cycle tests

• Strict particle contamination control measures

Quality Assurance

Each unit undergoes:

• Dimensional accuracy verification (±0.02mm tolerance)

• Surface roughness testing (Ra < 0.2μm)

• Comprehensive visual inspection

• Final cleaning and packaging in Class 100 cleanroom

Applications

The boats are currently being used for:

• Diffusion processes

• Annealing treatments

• Oxidation processes

• CVD applications

Future Developments

Building on this success, Shenyang Starlight is now developing:

• 12-inch version for next-generation wafer sizes

• Customized designs for specific process requirements

• Advanced coatings for specialized applications

Company Commitment

"As a company with three decades of ceramic expertise, we remain committed to pushing the boundaries of semiconductor materials technology," added Dr. Li. "This product launch demonstrates our capability to develop solutions that meet the industry's most demanding requirements."